Relationship

Taiwan Semiconductor Manufacturing Company relies on ASML

TSMC depends on advanced lithography equipment supplied by ASML for leading-edge semiconductor manufacturing.

Importance
Critical
Confidence
99/100

Sources (2)

History

  • 2018-01-01Standard EUV adoption for 7nm/5nm: TSMC became one of the earliest and largest buyers of ASML's standard (0.33 NA) EUV lithography systems, using them to bring its 7nm and later 5nm process nodes into high-volume production.
  • 2024-11-01First High-NA EUV tool ordered, adoption deferred: TSMC arranged to receive its first ASML High-NA EUV lithography machine (the TWINSCAN EXE:5000, capable of printing lines as thin as 8nm) by year-end, becoming the second manufacturer after Intel to receive one — but held off on production adoption.
  • 2026-01-01High-NA adoption deferred to 2029 over cost: TSMC signaled no plans to introduce High-NA EUV into production before 2029, with senior leadership citing cost as the main barrier — even as Intel and Samsung moved ahead with their own High-NA adoption plans, marking a rare divergence in TSMC's usually fast equipment-adoption pace.

Cite this

InsightNodes, "Taiwan Semiconductor Manufacturing Company relies on ASML" — Critical importance, 2 sources. https://insightnodes.com/claims/r/tsmc~asml~depends-on (accessed October 31, 2026).

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